中心議題：

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title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" 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title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" 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• MEMS振蕩器與石英晶振的比較
• 全硅MEMS三級(jí)時(shí)鐘方案替代恒溫晶振和溫補(bǔ)晶振

傳統(tǒng)晶振的頻率來(lái)自石英,。石英晶片施加電場(chǎng)后，晶片會(huì)產(chǎn)生機(jī)械變形,，反之,，若施加壓力使石英晶片發(fā)生變形，則在晶片上會(huì)產(chǎn)生電場(chǎng),，這就是石英的壓電效應(yīng)?，F(xiàn)在，MEMS技術(shù)的應(yīng)用使得MEMS元件可以取代晶振中的石英晶片產(chǎn)生頻率，MEMS振蕩器正在挑戰(zhàn)傳統(tǒng)石英晶振的地位,。

MEMS振蕩器的構(gòu)造

晶振的核心的石英晶體切割而成的薄片,，MEMS振蕩器的核心是MEMS諧振器。圖1是MEME振蕩器的內(nèi)部構(gòu)造,，右邊的MEMS諧振器四邊的梁可以前后振動(dòng),，從而產(chǎn)生頻率。SiTime是一家提供MEMS全硅時(shí)鐘方案的無(wú)晶圓廠模擬IC設(shè)計(jì)公司,。SiTime市場(chǎng)營(yíng)銷副總裁Piyush Sevalia介紹說(shuō),，將MEMS諧振器進(jìn)行真空封裝，然后與一顆模擬IC封裝在一起就可以構(gòu)成一個(gè)完整的MEMS振蕩器,。相比與石英晶振的金屬或陶瓷封裝,，MEMS振蕩器采用低成本的塑料封裝,。

 
圖1：MEMS諧振器四邊的梁前后振動(dòng)產(chǎn)生時(shí)鐘頻率

 
圖2：MEMS諧振器與模擬IC集成在一起,，可以采用低成本的塑料封裝

SiTime的MEMS時(shí)鐘技術(shù)來(lái)自博世（Bosch）。2005年,，SiTime從博世分拆出來(lái)專注于全硅時(shí)鐘解決方案,。對(duì)于MEMS時(shí)鐘方案取代石英晶振的意義，Piyush Sevalia認(rèn)為,，這樣的取代如同集成電路取代電子管器件,、存儲(chǔ)芯片取代光盤(pán)和膠卷一般偉大！

MEMS振蕩器VS石英晶振

基于不同原理,，MEMS振蕩器相對(duì)石英晶振有一些比較優(yōu)勢(shì)：

• 可以集成在內(nèi)部標(biāo)準(zhǔn)塑料封裝中
• 集成實(shí)現(xiàn)高精度時(shí)鐘 (±5 PPM 至 ±25 PPM)
• 無(wú)需任何外部時(shí)鐘,，簡(jiǎn)化了系統(tǒng)設(shè)計(jì)
• 無(wú) PCB 布板或 XTAL 匹配問(wèn)題
• 較低擁有成本

對(duì)于較低擁有成本，MEMS振蕩器本身成本比石英晶振低,，而且工程師在使用時(shí)可以設(shè)置輸出頻率,，一顆器件能夠輸出多種頻率，不必像石英晶振一樣,，為不同的頻率安裝不同的晶振,。Piyush Sevalia介紹說(shuō)，這一點(diǎn)對(duì)于用戶端的工程師和器件生產(chǎn)廠家都是利好,。石英晶振在晶片切割時(shí)頻率就已經(jīng)固定,，無(wú)法通用，MEMS振蕩器讓時(shí)鐘產(chǎn)品成為標(biāo)準(zhǔn)品一樣的生產(chǎn)和使用,。

 
圖3：MEMS振蕩器解決方案不需外部時(shí)鐘,，簡(jiǎn)化了系統(tǒng)設(shè)計(jì)

目前，SiTime MEMS振蕩器的批量應(yīng)用市場(chǎng)包括：存儲(chǔ)服務(wù)器,、EPON/GPON網(wǎng)關(guān),、計(jì)算服務(wù)器、10G交換機(jī)、以太網(wǎng)交換機(jī),、平板電腦,、電子書(shū)、筆記本電腦,、機(jī)頂盒,、SSD、基站,、MFP,、VoIP電話、DVR/CCTV/IP攝像機(jī),、DSC,、對(duì)講機(jī)、智能電表,、視頻電話,、汽車黑匣子等。由于功耗與相位噪聲暫時(shí)達(dá)不到手機(jī)應(yīng)用的要求,，所以應(yīng)用在手機(jī)中的MEMS振蕩器還在開(kāi)發(fā)中,。Piyush Sevalia介紹說(shuō)：到2011年9月為止，SiTime已經(jīng)交付了7500萬(wàn)顆MEMS振蕩器,，在MEMS時(shí)鐘市場(chǎng)占有85%的市場(chǎng)份額,，計(jì)劃明年出貨量做到1億顆。電腦OEM 5強(qiáng)中的4家,、消費(fèi)電子OEM 5強(qiáng)中的3家,、合同制造商5強(qiáng)中的3家、ODM 5強(qiáng)均已批量使用SiTime的產(chǎn)品,。

全硅MEMS三級(jí)時(shí)鐘方案替代恒溫晶振和溫補(bǔ)晶振

近日,，SiTime推出了SiT530x系列全硅MEMS三級(jí)時(shí)鐘(Stratum 3)解決方案，以替代傳統(tǒng)的恒溫晶振和溫補(bǔ)晶振產(chǎn)品,。Yole Développement首席執(zhí)行官和創(chuàng)始人Jean-Christophe Eloy,表示：“MEMS時(shí)鐘替代傳統(tǒng)恒溫晶振和溫補(bǔ)晶振產(chǎn)品代表著了一個(gè)新的里程碑,，因?yàn)檫@在幾年前還被認(rèn)為是無(wú)法通過(guò)MEMS時(shí)鐘技術(shù)實(shí)現(xiàn)的。” 

 
圖4：MEMS三級(jí)鐘和傳統(tǒng)OCXO和TCXO三級(jí)鐘的比較

SiT5301和SiT5302定位于電信和網(wǎng)絡(luò)基礎(chǔ)設(shè)施,，如基于同步光纖網(wǎng)（SONET）和同步以太網(wǎng)的核心及邊緣路由器,、無(wú)線基站、IP時(shí)鐘和智能電網(wǎng)等應(yīng)用,。SiT530x系列兼具三級(jí)鐘(Stratum 3)穩(wěn)定性,、小尺寸、低電壓運(yùn)行和可編程特性,，支持客戶方便快捷地實(shí)現(xiàn)產(chǎn)品的差異化和定制,。SiTime首席執(zhí)行官Rajesh Vashist表示：“SiTime的革命性技術(shù)能夠集成全硅MEMS和模擬集成電路,，從而實(shí)現(xiàn)創(chuàng)新解決方案。石英行業(yè)用了幾十年時(shí)間才實(shí)現(xiàn)該精密度,，而SiTime僅用了5年時(shí)間便突破了這一性能水平,。通過(guò)將高性能、低成本和易用性完美結(jié)合,，我們已成功使500多家客戶放棄了傳統(tǒng)的石英產(chǎn)品,，轉(zhuǎn)而采用我們的產(chǎn)品。”

SiTime代理商艾睿電子全球市場(chǎng)和Asset Management高級(jí)副總裁Jeff Eastman指出：“SiTime可編程架構(gòu)可保證艾睿隨時(shí)有現(xiàn)貨,。我們?cè)S多客戶都以在收益于SiTime全硅方案的優(yōu)點(diǎn),。艾睿遍布全球的銷售渠道和SiTime獨(dú)一無(wú)有的技術(shù)，可使我們更有力更快速在電子市場(chǎng)中全面的推廣SiTime具有創(chuàng)新性的時(shí)鐘產(chǎn)品,。”